Epitaxy

Epitaxy is the art of growing perfect crystals at a crystalline substrate, with nanometer precision in thicknesses and accurate composition control.

We have the capacity to grow

  • Si/SiGe on Si substrates
  • InGaAsP(N) on InP and GaAs substrates
  • AlGaAs on GaAs substrates
  • SiC on Si and SiC substrates

 NameModelManufacturerLab
DetailsEpsilon2000Si-epiASM200Electrum
DetailsAsterixMovpeAixtron AIX 200/4Electrum
DetailsMozartGaAs-MOVPE D180 LDMVeeco TurboDiscElectrum
DetailsObelixLP-VPE 2106AixtronElectrum
DetailsSemlanVP508/SK SiC-VPEEpigress Electrum
DetailsNapoleonVP508GFR SiC epiAixtronElectrum
DetailsLPE 106PE106LPEElectrum


Electrum Laboratory LIMS                Greenhouse Labs LIMS                KTH Materials Laboratory LIMS