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Thin Film Deposition
Thin Film Deposition
Name
Model
Manufacturer
Responsible group name
Details
AJA Sputter Albanova
Orion
AJA International Inc.
Nanostructure Physics
Details
Edwards Auto 306 Albanova
Auto306 with FL400 chamber
Edwards
BIOX
Details
Eurovac UHV deposit, Albanova
Custom made
Eurovac/Thermionics
Condensed Matter Physics
Details
Sputnik Albanova
Custom made
Thermionics + other
Nanostructure Physics
Details
AJA 2 Sputter Albanova
Orion
AJA International Inc.
Nanostructure Physics