Home
About us
Materials Research
Materials Research at KTH
Materials Research School Wise
Resources
All Resources
KTH Resources School Wise
News & Links
Contact
Login
ABE School Resources
Sample Preparation
Thermal Processes
Other Processes
Chemical Characterization
Mechanical Characterization
Rheological Characterization
Tomography
Other Characterization
CHE School Resources
Device Mounting
Thermal Processes
Preparation of Chemical Substances
Purification of Chemical Substances
Other Processes
Chemical Characterization
Diffraction
Mechanical Characterization
Microscopy
Rheological Characterization
Spectroscopy
ICT School Resources
Materials Processing/Synthesis
Materials Characterization
ITM School Resources
Sample Preparation
Thermal Processes
Mechanical Characterization
Electron Microscopy
Optical Microscopy
SCI School Resources
Device Mounting
Dry Etching
Lithography
Sample Preparation
Thermal Processes
Thin Film Deposition
Acoustical Characterization
Microscopy
Laser Systems
Mechanical Characterization
Spectroscopy
Other Characterization
STH School Resources
Electron Microscopy
Resources
//
KTH Resources School Wise
//
SCI School Resources
//
Thin Film Deposition
Thin Film Deposition
Name
Model
Manufacturer
Responsible group name
Details
AJA Sputter Albanova
Orion
AJA International Inc.
Nanostructure Physics
Details
Edoardo evaporator Albanova
KE400E
Kenosistec
Nanostructure Physics
Details
AJA 3 Sputter Albanova
ATC Orion-8
AJA International
Nanostructure Physics
Details
Adder ICPCVD Albanova
PlasmaPro100 ICPCVD
Oxford Instruments
Nanostructure Physics
Details
AJA 2 Sputter Albanova
Orion
AJA International Inc.
Nanostructure Physics
Details
Parylene coater
PDS 2010
SCS
MST
Details
AJA evaporator Albanova
ATC1800
AJA international Inc.
Nanostructure Physics