Dry Etching

 NameModelManufacturerResponsible group name
DetailsPlasmatvätt PicoLow pressure plasma etcherDiener PICO RFNano-QLA
DetailsRIE ICP O2/AR AlbanovaPlasmalab 80+OxfordNanostructure Physics
DetailsCryo RIE AlbanovaPlasmalab 100OxfordBIOX