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Dry Etching
Dry Etching
Name
Model
Manufacturer
Responsible group name
Details
Plasmatvätt Pico
Low pressure plasma etcher
Diener PICO RF
Nano-QLA
Details
RIE ICP O2/AR Albanova
Plasmalab 80+
Oxford
Nanostructure Physics
Details
Cryo RIE Albanova
Plasmalab 100
Oxford
BIOX