Home
About us
Materials Research
Materials Research at KTH
Materials Research School Wise
Resources
All Resources
KTH Resources School Wise
News & Links
Contact
Login
ABE School Resources
Sample Preparation
Thermal Processes
Other Processes
Chemical Characterization
Mechanical Characterization
Rheological Characterization
Tomography
Other Characterization
CHE School Resources
Device Mounting
Thermal Processes
Preparation of Chemical Substances
Purification of Chemical Substances
Other Processes
Chemical Characterization
Diffraction
Mechanical Characterization
Microscopy
Rheological Characterization
Spectroscopy
ICT School Resources
Materials Processing/Synthesis
Materials Characterization
ITM School Resources
Sample Preparation
Thermal Processes
Mechanical Characterization
Electron Microscopy
Optical Microscopy
SCI School Resources
Device Mounting
Dry Etching
Lithography
Sample Preparation
Thermal Processes
Thin Film Deposition
Acoustical Characterization
Microscopy
Laser Systems
Mechanical Characterization
Spectroscopy
Other Characterization
STH School Resources
Electron Microscopy
Resources
//
KTH Resources School Wise
//
SCI School Resources
//
Dry Etching
Dry Etching
Name
Model
Manufacturer
Responsible group name
Details
Plasmatvätt Pico
Low pressure plasma etcher
Diener PICO RF
IRnova
Details
RIE ICP O2/AR Albanova
Plasmalab 80+
Oxford
Nanostructure Physics
Details
Cryo RIE Albanova
Plasmalab 100
Oxford
BIOX
Details
Cobra ICPRIE Albanova
Plasmapro 100 Cobra 300
Oxford Instruments
Nanostructure Physics
Details
AJA ion beam etching Albanova
AJA ion miller
AJA international Inc.
Nanostructure Physics