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Lithography
Lithography
Name
Model
Manufacturer
Responsible group name
Details
Ebeam litho Albanova
Raith Voyager
Raith GmbH
Nanostructure Physics
Details
MLA150 Albanova
MLA150
Heidelberg Instruments GmbH
Nanostructure Physics
Details
SmartPrint Maskless Litho Albanova
SmartPrint
SmartForce Technologies
Nanostructure Physics
Details
Beamer computer Albanova
Version 5.90
GeniSys GmbH
Nanostructure Physics