Home
About us
Materials Research
Materials Research at KTH
Materials Research School Wise
Resources
All Resources
KTH Resources School Wise
News & Links
Contact
Login
Materials Processing/Synthesis
Materials Characterization
Resources
//
KTH Resources School Wise
//
ICT School Resources
//
Materials Processing/Synthesis
//
Wet Process Benches
Wet Process Benches
Name
Model
Manufacturer
Responsible group name
Details
Rinser 2
Verteq
Verteq
QLA-Nanoteknik
Details
Wetb-Si epi-clean
Wet bench Clean and IMEC
Wet bench Clean
ELAB
Details
W0607
Wet bench HF clean and HF doped
Wet bench HF clean
ELAB
Details
Wetb Si process
Wet bench oxide,HF 1:10,BHF,HFmix
Wet bench oxide
ELAB
Details
Wetb Si strip
Photoresist processing.
Wet bench developer
ELAB
Details
Wetb APL
Wet bench
Wet bench
ELAB
Details
Wetb MEMS
TMAH, HF, KOH
Wet bench
ELAB
Details
Wetb metal
Au/metal etch
Wet bench
ELAB
Details
Wetb solvent
Remover, Vax, Au module
Wet bench
ELAB
Details
Wetb Au develop
Wet bench
Wet bench
ELAB
Details
Wet-Chemistry
Introduktion
Wet chemistry
ELAB
Details
W2631
Wet bench spray etch (GaAs).
Wet bench
QLA-Nanoteknik
Details
W3233
Wet bench lift off.
Wet bench
QLA-Nanoteknik
Details
W34
Wet bench Lithografi
Wet bench
QLA-Nanoteknik
Details
FH APL
Fume hood
Fume hood
QLA-Nanoteknik
Details
Wetb Solvent clean
Substrate cleaning
Wet bench
ELAB
Details
Wetb APL-gul
Wet bench
Wet bench
ELAB
Details
Rinser 1
Verteq
Verteq
QLA-Nanoteknik
Details
R/D double
Semitool Double 870S
Semitool
ELAB
Details
R/D 3
Verteq
Verteq
QLA-Nanoteknik
Details
FH III/V
Dragskåp
PM Plast
QLA-Nanoteknik
Details
R/D Gul1
FSI Phoenix 4"
FSI Phoenix
ELAB
Details
R/D 2
Verteq 4"
Verteq
ELAB
Details
FH wet chemistry-1
Dragskåp solvent & acid (for service work)
PM Plast
ELAB
Details
R/D Metals
Semitool 4" Metals
Semitool
ELAB
Details
R/D Gold
FSI Phoenix 4" Au/Lift-Off
FSI Phoenix
ELAB
Details
FH wet chemistry-2 (solvent)
Dragskåp solvent
PM Plast
ELAB
Details
FH wet chemistry-3
Dragskåp solvent and acid
PM Plast
ELAB
Details
FH wet chemistry-4
Dragskåp solvent
PM Plast
ELAB
Details
FH wet chemistry-5 (solvent)
Dragskåp solvent
PM Plast
ELAB
Details
FH wet chemistry-6
Dragskåp solvent
PM Plast
ELAB
Details
Megasonic bath
PCT 24 wet bench
PCT
ELAB
Details
FH epi service
Dragskåp för epi rengöring
PM Plast
ELAB
Details
Wetb Sabina
2 HP, Developer, Sink
PM Plast
QLA-Nanoteknik
Details
FH wet chemistry-7
Dragskåp
PM PLast
ELAB
Details
FH wet chemistry-8
Dragskåp
PM Plast
ELAB
Details
SSEC
SSEC 3300
Vecco
ELAB
Details
FH Service
Fume hood for service
PM plast
ELAB
Details
Wetb Al etch
Etching
Wet bench
ELAB
Details
Brage
Fume hood
PM Plast
Smart Hardware
Details
Nanna
Fume hood
PM Plast
Smart Hardware
Details
5175 DS-1
OR-ST 1500
burdinola
ELAB
Details
5175 DS-2
OR-ST 1500
burdinola
Nanosized
Details
5175 DS-3
OR-ST 1500
burdinola
Bright Day Graphene AB
Details
5269 DS-1
OR-ST 1500
burdinola
EKT
Details
5269 DS-2
OR-ST 1500
burdinola
EKT
Details
5269 DS-3
OR-ST 1500
burdinola
EKT
Details
5269 DS-4
OR-ST 1500
burdinola
EKT
Details
5269 DS-5
OR-ST 1500
burdinola
EKT
Details
5269 DS-6
OR-ST 1500
burdinola
EKT
Details
5269 DS-7
OR-ST 1500
burdinola
EKT