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Materials Processing/Synthesis
Materials Characterization
Resources
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KTH Resources School Wise
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Materials Processing/Synthesis
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Thin Film Deposition
Thin Film Deposition
Name
Model
Manufacturer
Responsible group name
Details
IDP
LPCVD furnace
Expertech
EKT
Details
Barbara
PAK 600 Coating System
Provac
QLA-Nanoteknik
Details
Indira
BA 510 Thermal Evaporator
Balzers
QLA-Nanoteknik
Details
Pekka
80Plus (Oxford PECVD System) Chamber A
Plasmalab
QLA-Nanoteknik
Details
KDF
844GT
KDF
QLA-Nanoteknik
Details
ALD
TFS200
BENEQ
EKT
Details
PLD
Neocera Pioneer 180 UHV PLD
Neocera Inc
Condensed Matter Physics
Details
Endura
PVD
Applied Materials
EKT