Thin Film Deposition

 NameModelManufacturerResponsible group name
DetailsIDPLPCVD furnaceExpertechEKT
DetailsBarbaraPAK 600 Coating SystemProvacQLA-Nanoteknik
DetailsIndiraBA 510 Thermal EvaporatorBalzersQLA-Nanoteknik
DetailsPekka80Plus (Oxford PECVD System) Chamber APlasmalabQLA-Nanoteknik
DetailsKDF844GTKDFQLA-Nanoteknik
DetailsKDF_Au runs844KDFQLA-Nanoteknik
DetailsALDTFS200BENEQEKT
DetailsPLDNeocera Pioneer 180 UHV PLDNeocera IncCondensed Matter Physics
DetailsEnduraPVDApplied MaterialsEKT
DetailsICPCVDPlasmaPro 100Oxford Plasma TechnologyQLA-Nanoteknik