Thin Film Deposition

 NameModelManufacturerResponsible group name
DetailsIDPLPCVD furnaceExpertechEKT
DetailsSTSPECVDSTSFMI-TP
DetailsBarbaraPAK 600 Coating SystemProvacNano-QLA
DetailsIndiraBA 510 Thermal EvaporatorBalzersNano-QLA
DetailsZitaBAE 250 Coating SystemBalzersHMA-TP
DetailsPekka80Plus (Oxford PECVD System) Chamber APlasmalabNano-QLA
DetailsIBSIon Beam Sputtering ToolCommonwealth Scientific CorporationNano-QLA
DetailsKDF844GTKDFNano-QLA
DetailsAJA SputterATC Orion-8AJA InternationalMF-TP
DetailsEdvard160EdvardsNano-QLA
DetailsALDTFS200BENEQEKT
DetailsPLDNeocera Pioneer 180 UHV PLDNeocera IncCondensed Matter Physics
DetailsEnduraPVDApplied MaterialsEKT