Thermal Processes

 NameModelManufacturerResponsible group name
DetailsYes-ugnPolyimide Bake Oven YES-450PB8-2/6-2YESQLA-Nanoteknik
DetailsPeoPEO-603 Anneal furnace III/V (ramp)PEOQLA-Nanoteknik
DetailsBake 5U 26MemmertQLA-Nanoteknik
DetailsActivatorActivator 150 (SiC anneal)CentrothermQLA-Nanoteknik
DetailsT1-Oxide 1250C5200ThermcoELAB
DetailsT2-Oxide 1250C5200ThermcoELAB
DetailsT3-Gate ox5200ThermcoELAB
DetailsT4-FGA5200ThermcoELAB
DetailsRotating Tube Furnacethermicon PHeraeusFNM-TP
DetailsVacuum Oven B&HVacuceIIBuch & HalmFNM-TP
DetailsBox furnaceCWF 1200CARBOLITEFNM-TP
DetailsAS-One RTPAS-OneAnnealsysEKT