Thermal Processes

 NameModelManufacturerResponsible group name
DetailsRTA100 RTP SystemsMattsonEKT
DetailsYes-ugnPolyimide Bake Oven YES-450PB8-2/6-2YESNano-QLA
DetailsPeoPEO-603 Anneal furnace III/V (ramp)PEONano-QLA
DetailsBake 5U 26MemmertNano-QLA
DetailsActivatorActivator 150 (SiC anneal)CentrothermNano-QLA
DetailsT1-Oxide 1250C5200ThermcoELAB
DetailsT2-Oxide 1250C5200ThermcoELAB
DetailsT3-Gate ox5200ThermcoELAB
DetailsT4-FGA5200ThermcoELAB