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Materials Processing/Synthesis
Materials Characterization
Resources
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KTH Resources School Wise
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ICT School Resources
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Materials Processing/Synthesis
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Lithography
Lithography
Name
Model
Manufacturer
Responsible group name
Details
Gamma
Gamma 4M
Suss Microtec
In2great Materials
Details
Bake 7
Ramp able
Nabertherm
QLA-Nanoteknik
Details
FH APL-gul
Dragskåp
PM Plast
QLA-Nanoteknik
Details
Karl Suss
Mask aligner MA8/BA8
Karl Suss
QLA-Nanoteknik
Details
Emma
MA6/BA6
Karl Suss
QLA-Nanoteknik
Details
Bake 2
Pre and postprocessing of samples
Bake oven Despatch
EKT
Details
Bake 3
Pre and postprocessing of samples
Bake oven Memmert
EKT
Details
Masktvätt
SCS 124
Ultra t Equipment Company, Inc.
ELAB
Details
APL-HMDS
Vacuum Bake / Vapour Prime Processing System
YES-5E
QLA-Nanoteknik
Details
HMDS 2
Star 2000 (HMDS)
IMTEC
QLA-Nanoteknik
Details
FH Gul3
Dragskåp
PM Plast
QLA-Nanoteknik
Details
ALS-stepper
ALS 2035 G-line
GCA/Ultratech
EKT
Details
Bake 4
U 26
Memmert
QLA-Nanoteknik
Details
Bake 6
Oven
Despatch
QLA-Nanoteknik
Details
Maximus
Maximus 804
SSE
QLA-Nanoteknik
Details
NSR i-line stepper
TFHi12
Nikon
EKT
Details
Labspin80
Labspin8-BM
Suss Microtec
QLA-Nanoteknik
Details
ULVAC photoresist stripper
ENVIRO-1Xa
ULVAC
EKT
Details
Labspin 82
Labspin8 BM
Suss Microtec
QLA-Nanoteknik