Lithography

 NameModelManufacturerResponsible group name
DetailsGammaGamma 4MSuss MicrotecELAB
DetailsBake 7UM 100 bakeMemmertNano-QLA
DetailsFH APL-gulDragskåpPM PlastNano-QLA
DetailsKarl SussMask aligner MA8/BA8Karl SussNano-QLA
DetailsSabinaSpinner model Primus SB15SSENano-QLA
DetailsEmmaMA6/BA6Karl SussNano-QLA
DetailsNils620 UV Nanoimprint LithographyEVGHMA-TP
DetailsBake 2Pre and postprocessing of samplesBake oven DespatchEKT
DetailsBake 3Pre and postprocessing of samplesBake oven MemmertEKT
DetailsMasktvättSCS 124Ultra t Equipment Company, Inc.ELAB
DetailsArnoldOPTISPIN SST20SSE spincoaterNano-QLA
DetailsAPL-HMDSVacuum Bake / Vapour Prime Processing SystemYES-5E Nano-QLA
DetailsHMDS 2Star 2000 (HMDS)IMTECNano-QLA
DetailsFH Gul3DragskåpPM PlastNano-QLA
DetailsALS-stepperALS 2035 G-lineGCA/UltratechEKT
DetailsBake 4U 26MemmertNano-QLA
DetailsBake 6ULM 400MemmertNano-QLA
DetailsMaximusMaximus 804SSENano-QLA
DetailsManual spray coaterv1Home madeMST
DetailsAPL spinnerBuilt inBLENano-QLA
DetailsNSRTFHi12NikonEKT