Epitaxy

 NameModelManufacturerResponsible group name
DetailsEpsilon2000Si-epiASM200EKT
DetailsAsterixMovpeAixtron AIX 200/4EKT
DetailsMozartGaAs-MOVPE D180 LDMVeeco TurboDiscIRnova
DetailsObelixLP-VPE 2106AixtronHMA-TP
DetailsSemlanVP508/SK SiC-VPEEpigress Nano-QLA
DetailsNapoleonVP508GFR SiC epiAixtronNano-QLA
DetailsLPE 106PE106LPEAscatron