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Materials Processing/Synthesis
Materials Characterization
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Materials Processing/Synthesis
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Epitaxy
Epitaxy
Name
Model
Manufacturer
Responsible group name
Details
Epsilon2000 SiGe epitaxy
Si-epi
ASM200
EKT
Details
Asterix
Movpe
Aixtron AIX 200/4
EKT
Details
Obelix
LP-VPE 2106
Aixtron
HMA-TP
Details
Napoleon
VP508GFR SiC epi
Aixtron
QLA-Nanoteknik
Details
LPE 106
PE106
LPE
QLA-Nanoteknik
Details
Frej
Flip Top CCS MOVPE System
Aixtron
Smart Hardware
Details
LPE 108
PE108
LPE
QLA-Nanoteknik