Epitaxy

	Name	Model	Manufacturer	Responsible group name
Details	Epsilon2000 SiGe epitaxy	Si-epi	ASM200	EKT
Details	Asterix	Movpe	Aixtron AIX 200/4	EKT
Details	Obelix	LP-VPE 2106	Aixtron	HMA-TP
Details	Napoleon	VP508GFR SiC epi	Aixtron	Ascatron
Details	LPE 106	PE106	LPE	Ascatron
Details	Frej	Flip Top CCS MOVPE System	Aixtron	Smart Hardware